UEBERBLICK UEBER DIE PALAEONTOLOGISCHE GLIEDERUNG DER EISENERZFORMATION IN DEUTSCH-LOTHRINGEN UND LUXEMBOURG. (COUP D'OEIL SUR LESDIVISIONS PALEONTOLOGIQUES DE LA FORMATION FERRIFERE EN LORRAINE ALLEMANDE ET AU LUXEMBOURG).BENECKE W.1901; MEM. SERV. CARTE GEOL. ALSACE LORRAINE; FRA; 1901, VOL. 5, NUM. 0003, P. 139 A 164Miscellaneous

Silicon micromachining for microsensors and microactuatorsBENECKE, W.Microelectronic engineering. 1990, Vol 11, Num 1-4, pp 73-82, issn 0167-9317Conference Paper

Die Quäker in den Kresy Wschodnie der Zweiten Polnischen Republik = The Quakers in the Kresy Wschodnie of the Second Polish RepublicBENECKE, W.Jahrbücher für Geschichte Osteuropas. 1994, Vol 42, Num 4, pp 510-520, issn 0021-4019Article

A humidity sensor featuring a porous silicon capacitor with an integrated refresh resistorRITTERSMA, Z. M; BENECKE, W.Sensors and materials. 2000, Vol 12, Num 1, pp 35-55, issn 0914-4935Article

Low-temperature silicon wafer bondingQUENZER, H. J; BENECKE, W.Sensors and actuators. A, Physical. 1992, Vol 32, Num 1-3, pp 340-344, issn 0924-4247Conference Paper

Microtechnologies for microscaled robots and componentsGEBHARD, M; BENECKE, W.INRIA / IEEE symposium on emerging technologies and factories automation. 1995, pp 9-20, isbn 0-7803-2535-4, 3VolConference Paper

Permanent magnet micromotors on silicon substratesWAGNER, B; KREUTZER, M; BENECKE, W et al.Journal of microelectromechanical systems. 1993, Vol 2, Num 1, pp 23-29, issn 1057-7157Article

Microactuators with moving magnets for linear, torsional or multiaxial motionWAGNER, B; BENECKE, W; ENGELMANN, G et al.Sensors and actuators. A, Physical. 1992, Vol 32, Num 1-3, pp 598-603, issn 0924-4247Conference Paper

Tribo-enhanced diffusion of nitrogen implanted into steel = Durch tribologische Vorgaenge beguenstigte Diffusion von in Stahl implantiertem StickstoffFELLER, H.G; KLINGER, R; BENECKE, W et al.Materials science and engineering. 1985, Vol 69, Num 1, pp 173-180, issn 0025-5416Conference Paper

Flow measurement in micromachined orificesSCHMIDT, H.-J; HOLTKAMP, F; BENECKE, W et al.Journal of micromechanics and microengineering (Print). 1997, Vol 7, Num 3, pp 189-192, issn 0960-1317Conference Paper

Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivityFUHR, G; HAGEDORN, R; MÜLLER, T et al.Journal of microelectromechanical systems. 1992, Vol 1, Num 3, pp 141-146, issn 1057-7157Article

NH₄OH-based etchants for silicon micromachining : influence of additives and stability of passivation layersSCHNAKENBERG, U; BENECKE, W; LÖCHL, B et al.Sensors and actuators. A, Physical. 1991, Vol 25, Num 1-3, pp 1-7Article

A monitoring instrument with capacitive porous silicon humidity sensorsRITTERSMA, Z. M; ZAAGMAN, W. J; ZETSTRA, M et al.Smart materials and structures. 2000, Vol 9, Num 3, pp 351-356, issn 0964-1726Article

A smart accelerometer with o-chip electronics fabricated by a commercial CMOS processRIETHMULLER, W; BENECKE, W; SCHNAKENBERG, U et al.Sensors and actuators. A, Physical. 1992, Vol 31, Num 1-3, pp 121-124, issn 0924-4247Conference Paper

Dielectric induction micromotors : field levitation and torque-frequency charactericsFUHR, G; HAGEDORN, R; MÜLLER, T et al.Sensors and actuators. A, Physical. 1992, Vol 32, Num 1-3, pp 525-530, issn 0924-4247Conference Paper

Electrostatic actuated optical Fabry-Perot switches in passive matrix displaysKNIELING, T; PANITZ, M; BENECKE, W et al.SPIE proceedings series. 2004, pp 108-118, isbn 0-8194-5256-4, 11 p.Conference Paper

Gas mixture analysis using silicon micro-reactor systemsBECKER, T; MÜHLBERGER, S; BOSCH-V.BRAUNMÜHL, C et al.Journal of microelectromechanical systems. 2000, Vol 9, Num 4, pp 478-484, issn 1057-7157Article

A porous silicon-based microsystem for humidity monitoringRITTERSMA, Z. M; ZAAGMAN, W. J; ZETSTRA, M et al.European conference on smart structures and materials in conjunctionInternational conference on micromechanics, intelligent materials and robotics. 1998, pp 551-557, isbn 0-7503-0547-9Conference Paper

Novel porous silicon formation technology using internal current generationSPLINTER, A; STÜRMANN, J; BENECKE, W et al.Materials science & engineering C. Biomimetic and supramolecular systems. 2001, Vol 15, Num 1-2, pp 109-112Conference Paper

Characteristics and electrical addressing of optical Fabry-Perot displaysKNIELING, T; LANG, W; BENECKE, W et al.Proceedings of SPIE, the International Society for Optical Engineering. 2005, pp 58750K.1-58750K.10, issn 0277-786X, isbn 0-8194-5880-5, 1VolConference Paper

Microfluidic system for the integration and cyclic operation of gas sensorsMECKES, A; BEHRENS, J; KAYSER, O et al.Sensors and actuators. A, Physical. 1999, Vol 76, Num 1-3, pp 478-483, issn 0924-4247Conference Paper

New cryoelectronic detector concept based on two-dimensional heat diffusionLEMKE, S; HEBRANK, F; GROSS, R et al.Journal of applied physics. 1993, Vol 73, Num 6, pp 2659-2666, issn 0021-8979Article

Levitation, holding, and rotation of cells within traps made by high-frequency fieldsFUHR, G; ARNOLD, W. M; HAGEDORN, R et al.Biochimica et biophysica acta. Biomembranes. 1992, Vol 1108, Num 2, pp 215-223, issn 0005-2736Article

Application of electroplating in MEMS-micromachining exemplified by a microrelayBECKER, M; NOTARP, D. Lütke; VOGEL, J et al.Microsystem technologies. 2001, Vol 7, Num 4, pp 196-202, issn 0946-7076Conference Paper

Electrostatically driven micromachined nickel resonators and gyroscopesRENKEN, O; BENECKE, W.SPIE proceedings series. 1999, pp 716-727, isbn 0-8194-3154-0, 2VolConference Paper